ALIO's patent pending Air Bearing XY Planar System with patent pending NANO Z™ lift and ultra precise rotary for Nano Metrology ™, FPD, Ink Jet Deposition, Solar Scribe, Laser machining and more applications needing True Nano Positioning ™

News and Updates

ALIO’s latest trademarks: TRUE NANO™,True Nano Positioning ™, Nano Metrology ™ and NANO Z™

The Patent Pending NANO Z™ stage delivers world standard precision for TRUE NANO Positioning ™ of Z motion (lifting motion) of less than 100 nm of accuracy in all 6 degrees of freedom.

Designing and building world leading TRUE NANO ™ motion systems takes special knowledge, people and a commitment to the product. ALIO engineers focus on product design with a passion to build the most precise motion systems in the world with the highest quality and reliability. ALIO has been designing and building True Nano Positioning ™ products for almost 9 years while other are just starting to use the word they have many years of development in front of them plus they must create new designs with novel machining techniques to meet the TRUE NANO ™ of 6 degrees of precision needed in this new world of NANO Precision.

Advanced Motion Systems for TRUE NANO™ Precision Applications.

ALIO Industries began in 2001 with an idea to create “a better way” to meet the nano precision robotic needs.  This initial idea has grown into an ever-expanding product line that includes Hexapod robotic systems, air bearing systems and mechanical bearing linear and rotary nano-precision systems for atmospheric, clean room and ultra high vacuum chambers all with TRUE NANO Positioning™.

ALIO, (which is Latin for “A better way.”) is an innovator in nano technology motion systems. ALIO’s designs exceed current standards of precision product designs for automation technology.  Holding two patents for the Parallel 6 Axis Hexapod and the Parallel 3 Axis Tripod as well as several patent pendings for nano Z stages and planar air bearing systems, ALIO has set the pace for nano precision design and systems.exapod

ALIO’s linear and rotary stage lines were designed to be cost effective and complement the market demand for high quality, nano precision motion. These applications can be used in normal atmospheric environments, clean rooms, and vacuum chamber environments. ALIO’s design of the rotary stages can be utilized for stand-alone motion or stackable for various serial kinematic structures. Hexapod

ALIO has also developed a series of standard and custom True Nano (TM) air bearing stages for nano-precision applications. These robust stages offer the same 5-nanometer resolution capabilities as our standard products with high stiffness and speeds from1 micron/sec to over 1 m/sec depending on application needs. These air-bearing stages are well suited when smooth, precise motion is required for advanced FPD, Photovoltaic and Semiconductor metrology, process and repair.

Nano-precision Motion Control Products & Systems

• Hexapods
• Air Bearing Stages
• Linear Stages
• Rotary Stages
• Vacuum Stages
• Custom Stages
• Motion Controllers

Alio Viet Nam